Characteristics of radio-frequency microelectromechanical-system switches for communication systems

Yeong Lin Lai, Yuen Hung Chen

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The static and modal characteristics of capacitive-coupling membrane-type radio-frequency (RF) microelectromechanicalsystem (MEMS) switches are comprehensively investigated by the finite element method. Static characteristics including displacement, stress, effective stiffness constant, and actuation voltage, and modal characteristics such as natural frequency and switching time are studied. The structures and the materials of the switches are the main factors that determine switch performance. The study focuses on how the static and modal characteristics of the RF MEMS switches are affected by their structures and materials.

Original languageEnglish
Pages (from-to)2820-2826
Number of pages7
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number4 B
DOIs
Publication statusPublished - 2007 Apr 24

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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