The static and modal characteristics of capacitive-coupling membrane-type radio-frequency (RF) microelectromechanicalsystem (MEMS) switches are comprehensively investigated by the finite element method. Static characteristics including displacement, stress, effective stiffness constant, and actuation voltage, and modal characteristics such as natural frequency and switching time are studied. The structures and the materials of the switches are the main factors that determine switch performance. The study focuses on how the static and modal characteristics of the RF MEMS switches are affected by their structures and materials.
|Number of pages||7|
|Journal||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|Issue number||4 B|
|Publication status||Published - 2007 Apr 24|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)