Changes in surface roughness and work function of indium-tin-oxide due to KrF excimer laser irradiation

Yow Jon Lin, Iain D. Baikie, Wei Yang Chou, Shih Ting Lin, Hsing Cheng Chang, Yao Ming Chen, Wen Fung Liu

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

In this study, from the observed x-ray photoelectron spectroscopy and atomic force microscopy results, and Kelvin probe measurements, it is suggested that the induced indium-tin-oxide (ITO) surface chemical changes by KrF excimer laser irradiation had strong effects on the surface work function (SWF) and surface roughness of ITO. During the laser irradiation, the incorporation of O2 2- peroxo species or the dissolution of oxygen species near the ITO surface leads to the reduction of the surface roughness and an increase in the SWF. In addition, it is worth noting that the laser-irradiated ITO sample has an excellent stability in the SWF.

Original languageEnglish
Pages (from-to)1305-1308
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume23
Issue number5
DOIs
Publication statusPublished - 2005 Sep 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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