Changes in surface band bending, surface work function, and sheet resistance of undoped ZnO films due to (NH4)2Sx treatment

Yow Jon Lin, Chia Lung Tsai

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Abstract

In this study, the interaction of undoped ZnO films with (N H4) 2 Sx treatment have been investigated by x-ray photoelectron spectroscopy, photoluminescence, optical transmittance, and four-point probe. According to the experimental results, we find that the formation of Zn-S bonds and the reduction of oxygen vacancies (i.e., the S occupation of oxygen vacancies) near the ZnO surface might lead to an increase in the upward band bending, resulting in an increase in the sheet resistance and work function of ZnO.

Original languageEnglish
Article number113721
JournalJournal of Applied Physics
Volume100
Issue number11
DOIs
Publication statusPublished - 2006 Dec 1

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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