Analysis of pull-in characteristics of double-clamped nanobeam incorporating casimir and van der waals effects

Cheng Chi Wang; Chih Jer Lin; Chin Chia Liu; Chia Chiang Hsu

doi:10.18494/SAM.2018.2081

Analysis of pull-in characteristics of double-clamped nanobeam incorporating casimir and van der waals effects

Cheng Chi Wang, Chih Jer Lin, Chin Chia Liu, Chia Chiang Hsu

Department of Industrial Education and Technology

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A hybrid numerical scheme comprising the differential transformation method (DTM) and the finite difference (FD) approximation approach is used to analyze the complex nonlinear pull-in behavior of an electrostatically actuated double-clamped nanobeam subject to Casimir and van der Waals force effects and an axial residual stress. It is shown that, for an initial gap size of 50 nm, the pull-in voltage predicted by the hybrid numerical scheme deviates from that predicted by the universal pull-in formula by just 0.2%. In addition, the results show that the Casimir and van der Waals forces both have a significant effect on the steady and dynamic deflection behaviors of the beam as a function of applied voltage. Finally, the minimum allowable gap without the applied voltage of double-clamped nanobeams can be determined.

Original language	English
Pages (from-to)	2627-2636
Number of pages	10
Journal	Sensors and Materials
Volume	30
Issue number	11
DOIs	https://doi.org/10.18494/SAM.2018.2081
Publication status	Published - 2018

All Science Journal Classification (ASJC) codes

Instrumentation
Materials Science(all)

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10.18494/SAM.2018.2081

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@article{3e20ef07c693405b814cd113957bf237,

title = "Analysis of pull-in characteristics of double-clamped nanobeam incorporating casimir and van der waals effects",

abstract = "A hybrid numerical scheme comprising the differential transformation method (DTM) and the finite difference (FD) approximation approach is used to analyze the complex nonlinear pull-in behavior of an electrostatically actuated double-clamped nanobeam subject to Casimir and van der Waals force effects and an axial residual stress. It is shown that, for an initial gap size of 50 nm, the pull-in voltage predicted by the hybrid numerical scheme deviates from that predicted by the universal pull-in formula by just 0.2%. In addition, the results show that the Casimir and van der Waals forces both have a significant effect on the steady and dynamic deflection behaviors of the beam as a function of applied voltage. Finally, the minimum allowable gap without the applied voltage of double-clamped nanobeams can be determined.",

author = "Wang, {Cheng Chi} and Lin, {Chih Jer} and Liu, {Chin Chia} and Hsu, {Chia Chiang}",

note = "Funding Information: The authors gratefully acknowledge the financial support provided to this study by the Ministry of Science and Technology of Taiwan under Grant Number MOST 107-2221-E-018-014.",

year = "2018",

doi = "10.18494/SAM.2018.2081",

language = "English",

volume = "30",

pages = "2627--2636",

journal = "Sensors and Materials",

issn = "0914-4935",

publisher = "M Y U Scientific Publishing Division",

number = "11",

}

TY - JOUR

T1 - Analysis of pull-in characteristics of double-clamped nanobeam incorporating casimir and van der waals effects

AU - Wang, Cheng Chi

AU - Lin, Chih Jer

AU - Liu, Chin Chia

AU - Hsu, Chia Chiang

N1 - Funding Information: The authors gratefully acknowledge the financial support provided to this study by the Ministry of Science and Technology of Taiwan under Grant Number MOST 107-2221-E-018-014.

PY - 2018

Y1 - 2018

N2 - A hybrid numerical scheme comprising the differential transformation method (DTM) and the finite difference (FD) approximation approach is used to analyze the complex nonlinear pull-in behavior of an electrostatically actuated double-clamped nanobeam subject to Casimir and van der Waals force effects and an axial residual stress. It is shown that, for an initial gap size of 50 nm, the pull-in voltage predicted by the hybrid numerical scheme deviates from that predicted by the universal pull-in formula by just 0.2%. In addition, the results show that the Casimir and van der Waals forces both have a significant effect on the steady and dynamic deflection behaviors of the beam as a function of applied voltage. Finally, the minimum allowable gap without the applied voltage of double-clamped nanobeams can be determined.

AB - A hybrid numerical scheme comprising the differential transformation method (DTM) and the finite difference (FD) approximation approach is used to analyze the complex nonlinear pull-in behavior of an electrostatically actuated double-clamped nanobeam subject to Casimir and van der Waals force effects and an axial residual stress. It is shown that, for an initial gap size of 50 nm, the pull-in voltage predicted by the hybrid numerical scheme deviates from that predicted by the universal pull-in formula by just 0.2%. In addition, the results show that the Casimir and van der Waals forces both have a significant effect on the steady and dynamic deflection behaviors of the beam as a function of applied voltage. Finally, the minimum allowable gap without the applied voltage of double-clamped nanobeams can be determined.

UR - http://www.scopus.com/inward/record.url?scp=85057584813&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85057584813&partnerID=8YFLogxK

U2 - 10.18494/SAM.2018.2081

DO - 10.18494/SAM.2018.2081

M3 - Article

AN - SCOPUS:85057584813

VL - 30

SP - 2627

EP - 2636

JO - Sensors and Materials

JF - Sensors and Materials

SN - 0914-4935

IS - 11

ER -