Analysis of nonlinear dynamic behavior of micro circular plate actuator using hybrid numerical method

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A hybrid differential transformation and finite difference scheme is used to analyze the complex nonlinear behavior of an electrostatically-actuated micro circular plate devices which is not easily analyzed using traditional methods such as perturbation theory or Galerkin approach method due to the complexity of the interactions among the electrostatic coupling effect, the residual stress and the nonlinear electrostatic force. The numerical results for the pull-in voltage are found to deviate by no more than 2.09% from the literature using various computational methods. Thus, the basic validity of the hybrid numerical scheme is confirmed. Moreover, the effectiveness of a combined DC / AC loading scheme in driving the micro circular actuator is examined. It is shown that the use of an AC actuating voltage in addition to the DC driving voltage provides an effective means of tuning the dynamic response of the micro circular plate.

Original languageEnglish
Title of host publicationECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers
Pages7402-7409
Number of pages8
Publication statusPublished - 2012 Dec 1
Event6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012 - Vienna, Austria
Duration: 2012 Sep 102012 Sep 14

Publication series

NameECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers

Other

Other6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012
CountryAustria
CityVienna
Period12-09-1012-09-14

All Science Journal Classification (ASJC) codes

  • Computational Theory and Mathematics
  • Applied Mathematics

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  • Cite this

    Liu, C-C. (2012). Analysis of nonlinear dynamic behavior of micro circular plate actuator using hybrid numerical method. In ECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers (pp. 7402-7409). (ECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers).