Abstract
A hybrid differential transformation and finite difference scheme is used to analyze the complex nonlinear behavior of an electrostatically-actuated micro circular plate devices which is not easily analyzed using traditional methods such as perturbation theory or Galerkin approach method due to the complexity of the interactions among the electrostatic coupling effect, the residual stress and the nonlinear electrostatic force. The numerical results for the pull-in voltage are found to deviate by no more than 2.09% from the literature using various computational methods. Thus, the basic validity of the hybrid numerical scheme is confirmed. Moreover, the effectiveness of a combined DC / AC loading scheme in driving the micro circular actuator is examined. It is shown that the use of an AC actuating voltage in addition to the DC driving voltage provides an effective means of tuning the dynamic response of the micro circular plate.
| Original language | English |
|---|---|
| Title of host publication | ECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers |
| Pages | 7402-7409 |
| Number of pages | 8 |
| Publication status | Published - 2012 Dec 1 |
| Event | 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012 - Vienna, Austria Duration: 2012 Sep 10 → 2012 Sep 14 |
Publication series
| Name | ECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers |
|---|
Other
| Other | 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012 |
|---|---|
| Country | Austria |
| City | Vienna |
| Period | 12-09-10 → 12-09-14 |
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All Science Journal Classification (ASJC) codes
- Computational Theory and Mathematics
- Applied Mathematics
Cite this
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Analysis of nonlinear dynamic behavior of micro circular plate actuator using hybrid numerical method. / Liu, Chin-Chia.
ECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers. 2012. p. 7402-7409 (ECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Analysis of nonlinear dynamic behavior of micro circular plate actuator using hybrid numerical method
AU - Liu, Chin-Chia
PY - 2012/12/1
Y1 - 2012/12/1
N2 - A hybrid differential transformation and finite difference scheme is used to analyze the complex nonlinear behavior of an electrostatically-actuated micro circular plate devices which is not easily analyzed using traditional methods such as perturbation theory or Galerkin approach method due to the complexity of the interactions among the electrostatic coupling effect, the residual stress and the nonlinear electrostatic force. The numerical results for the pull-in voltage are found to deviate by no more than 2.09% from the literature using various computational methods. Thus, the basic validity of the hybrid numerical scheme is confirmed. Moreover, the effectiveness of a combined DC / AC loading scheme in driving the micro circular actuator is examined. It is shown that the use of an AC actuating voltage in addition to the DC driving voltage provides an effective means of tuning the dynamic response of the micro circular plate.
AB - A hybrid differential transformation and finite difference scheme is used to analyze the complex nonlinear behavior of an electrostatically-actuated micro circular plate devices which is not easily analyzed using traditional methods such as perturbation theory or Galerkin approach method due to the complexity of the interactions among the electrostatic coupling effect, the residual stress and the nonlinear electrostatic force. The numerical results for the pull-in voltage are found to deviate by no more than 2.09% from the literature using various computational methods. Thus, the basic validity of the hybrid numerical scheme is confirmed. Moreover, the effectiveness of a combined DC / AC loading scheme in driving the micro circular actuator is examined. It is shown that the use of an AC actuating voltage in addition to the DC driving voltage provides an effective means of tuning the dynamic response of the micro circular plate.
UR - http://www.scopus.com/inward/record.url?scp=84871640064&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84871640064&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84871640064
SN - 9783950353709
T3 - ECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers
SP - 7402
EP - 7409
BT - ECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers
ER -