A hybrid differential transformation and finite difference scheme is used to analyze the complex nonlinear behavior of an electrostatically-actuated micro circular plate devices which is not easily analyzed using traditional methods such as perturbation theory or Galerkin approach method due to the complexity of the interactions among the electrostatic coupling effect, the residual stress and the nonlinear electrostatic force. The numerical results for the pull-in voltage are found to deviate by no more than 2.09% from the literature using various computational methods. Thus, the basic validity of the hybrid numerical scheme is confirmed. Moreover, the effectiveness of a combined DC / AC loading scheme in driving the micro circular actuator is examined. It is shown that the use of an AC actuating voltage in addition to the DC driving voltage provides an effective means of tuning the dynamic response of the micro circular plate.