Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application

Shih Chang Chen; Chiang Ho Cheng; Yi Cheng Lin

Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application

Shih Chang Chen, Chiang Ho Cheng, Yi Cheng Lin

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.

Original language	English
Title of host publication	19th IEEE International Conference on Micro Electro Mechanical Systems
Pages	762-765
Number of pages	4
Publication status	Published - 2006 Oct 24
Event	19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey Duration: 2006 Jan 22 → 2006 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2006
ISSN (Print)	1084-6999

Other

Other	19th IEEE International Conference on Micro Electro Mechanical Systems
Country	Turkey
City	Istanbul
Period	06-01-22 → 06-01-26

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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Cite this

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title = "Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application",

abstract = "A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.",

author = "Chen, {Shih Chang} and Cheng, {Chiang Ho} and Lin, {Yi Cheng}",

year = "2006",

month = oct,

day = "24",

language = "English",

isbn = "0780394755",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "762--765",

booktitle = "19th IEEE International Conference on Micro Electro Mechanical Systems",

note = "19th IEEE International Conference on Micro Electro Mechanical Systems ; Conference date: 22-01-2006 Through 26-01-2006",

}

Chen, SC, Cheng, CH & Lin, YC 2006, Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application. in 19th IEEE International Conference on Micro Electro Mechanical Systems., 1627911, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2006, pp. 762-765, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 06-01-22.

Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application. / Chen, Shih Chang; Cheng, Chiang Ho; Lin, Yi Cheng.

19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. p. 762-765 1627911 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Lin, Yi Cheng

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N2 - A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.

AB - A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.

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