Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application

Shih Chang Chen, Chiang Ho Cheng, Yi Cheng Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages762-765
Number of pages4
Publication statusPublished - 2006 Oct 24
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period06-01-2206-01-26

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Chen, S. C., Cheng, C. H., & Lin, Y. C. (2006). Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application. In 19th IEEE International Conference on Micro Electro Mechanical Systems (pp. 762-765). [1627911] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).