Abstract
A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.
| Original language | English |
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| Title of host publication | 19th IEEE International Conference on Micro Electro Mechanical Systems |
| Pages | 762-765 |
| Number of pages | 4 |
| Publication status | Published - 2006 Oct 24 |
| Event | 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey Duration: 2006 Jan 22 → 2006 Jan 26 |
Publication series
| Name | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
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| Volume | 2006 |
| ISSN (Print) | 1084-6999 |
Other
| Other | 19th IEEE International Conference on Micro Electro Mechanical Systems |
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| Country | Turkey |
| City | Istanbul |
| Period | 06-01-22 → 06-01-26 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering
Cite this
Chen, S. C., Cheng, C. H., & Lin, Y. C. (2006). Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application. In 19th IEEE International Conference on Micro Electro Mechanical Systems (pp. 762-765). [1627911] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).