Abstract
A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.
| Original language | English |
|---|---|
| Title of host publication | 19th IEEE International Conference on Micro Electro Mechanical Systems |
| Pages | 762-765 |
| Number of pages | 4 |
| Publication status | Published - 2006 Oct 24 |
| Event | 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey Duration: 2006 Jan 22 → 2006 Jan 26 |
Publication series
| Name | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
|---|---|
| Volume | 2006 |
| ISSN (Print) | 1084-6999 |
Other
| Other | 19th IEEE International Conference on Micro Electro Mechanical Systems |
|---|---|
| Country | Turkey |
| City | Istanbul |
| Period | 06-01-22 → 06-01-26 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering
Cite this
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Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application. / Chen, Shih Chang; Cheng, Chiang Ho; Lin, Yi Cheng.
19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. p. 762-765 1627911 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application
AU - Chen, Shih Chang
AU - Cheng, Chiang Ho
AU - Lin, Yi Cheng
PY - 2006/10/24
Y1 - 2006/10/24
N2 - A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.
AB - A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.
UR - http://www.scopus.com/inward/record.url?scp=33750141392&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33750141392&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:33750141392
SN - 0780394755
SN - 9780780394759
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 762
EP - 765
BT - 19th IEEE International Conference on Micro Electro Mechanical Systems
ER -