Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application

Shih Chang Chen, Chiang Ho Cheng, Yi Cheng Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages762-765
Number of pages4
Publication statusPublished - 2006 Oct 24
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period06-01-2206-01-26

Fingerprint

diaphragms
Diaphragms
Microfluidics
deflection
Actuators
actuators
shear
ejectors
Shear deformation
Experiments
Fluids
fluids
lead titanate zirconate

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Chen, S. C., Cheng, C. H., & Lin, Y. C. (2006). Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application. In 19th IEEE International Conference on Micro Electro Mechanical Systems (pp. 762-765). [1627911] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).
Chen, Shih Chang ; Cheng, Chiang Ho ; Lin, Yi Cheng. / Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application. 19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. pp. 762-765 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
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abstract = "A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.",
author = "Chen, {Shih Chang} and Cheng, {Chiang Ho} and Lin, {Yi Cheng}",
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Chen, SC, Cheng, CH & Lin, YC 2006, Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application. in 19th IEEE International Conference on Micro Electro Mechanical Systems., 1627911, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2006, pp. 762-765, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 06-01-22.

Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application. / Chen, Shih Chang; Cheng, Chiang Ho; Lin, Yi Cheng.

19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. p. 762-765 1627911 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.

AB - A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.

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Chen SC, Cheng CH, Lin YC. Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application. In 19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. p. 762-765. 1627911. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).