Analysis and experiment for the deflection of a shear-mode PZT actuator

C. H. Cheng, S. C. Chen, Z. X. Zhang, Y. C. Lin

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


The analytical closed-form solution for the deflection of a novel beam-shaped shear-mode PZT actuator is derived. The actuator can be applied in a microfluidic system. Its active region possesses two oppositely poled segments separated by one non-poled segment. The deflections in four cases of segment dimensional designs are compared between the analytical solution and the ANSYS FEM solution. The two solutions show good agreement. And the maximum deflection of the case with a symmetrical design is the largest. Moreover, an experiment for the sample with symmetrical design is performed and the actual shear piezoelectric coefficient is obtained. Based on the actual coefficient, the experimental result agrees with the analytical solution very well.

Original languageEnglish
Article number027
Pages (from-to)230-236
Number of pages7
JournalSmart Materials and Structures
Issue number1
Publication statusPublished - 2007 Jan 1

All Science Journal Classification (ASJC) codes

  • Signal Processing
  • Civil and Structural Engineering
  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Electrical and Electronic Engineering

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