Aerostatic moving stage positioning compensation using a numerical algorithm combined with an image acquisition method

Ming-Fei Chen, Pei Hao Wang, Wen Tse Hsiao

Research output: Contribution to journalArticle

Abstract

In this study, positioning error measurements and compensation techniques were developed for a two-dimensional (2D) coplanar aerostatic system. Standard optical template targets were acquired using charge-coupled device (CCD) image acquisition; after which, positioning errors were measured and compensated for. A 2D Lagrange equation was utilized to compensate for the precision of the precision aerostatic system. Experimental results showed that X- and Y-axis positioning accuracy improved from 5.06 to 1.53 μm and from 3.99 to 1.06 μm, respectively, signifying improvements of over 70%.

Original languageEnglish
JournalInternational Journal of Advanced Manufacturing Technology
DOIs
Publication statusPublished - 2019 Jan 1

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Image acquisition
Measurement errors
Charge coupled devices
Compensation and Redress

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Software
  • Mechanical Engineering
  • Computer Science Applications
  • Industrial and Manufacturing Engineering

Cite this

@article{c5e5a6d41cac4b06b4ddb1797c8a4eed,
title = "Aerostatic moving stage positioning compensation using a numerical algorithm combined with an image acquisition method",
abstract = "In this study, positioning error measurements and compensation techniques were developed for a two-dimensional (2D) coplanar aerostatic system. Standard optical template targets were acquired using charge-coupled device (CCD) image acquisition; after which, positioning errors were measured and compensated for. A 2D Lagrange equation was utilized to compensate for the precision of the precision aerostatic system. Experimental results showed that X- and Y-axis positioning accuracy improved from 5.06 to 1.53 μm and from 3.99 to 1.06 μm, respectively, signifying improvements of over 70{\%}.",
author = "Ming-Fei Chen and Wang, {Pei Hao} and Hsiao, {Wen Tse}",
year = "2019",
month = "1",
day = "1",
doi = "10.1007/s00170-019-04077-3",
language = "English",
journal = "International Journal of Advanced Manufacturing Technology",
issn = "0268-3768",
publisher = "Springer London",

}

TY - JOUR

T1 - Aerostatic moving stage positioning compensation using a numerical algorithm combined with an image acquisition method

AU - Chen, Ming-Fei

AU - Wang, Pei Hao

AU - Hsiao, Wen Tse

PY - 2019/1/1

Y1 - 2019/1/1

N2 - In this study, positioning error measurements and compensation techniques were developed for a two-dimensional (2D) coplanar aerostatic system. Standard optical template targets were acquired using charge-coupled device (CCD) image acquisition; after which, positioning errors were measured and compensated for. A 2D Lagrange equation was utilized to compensate for the precision of the precision aerostatic system. Experimental results showed that X- and Y-axis positioning accuracy improved from 5.06 to 1.53 μm and from 3.99 to 1.06 μm, respectively, signifying improvements of over 70%.

AB - In this study, positioning error measurements and compensation techniques were developed for a two-dimensional (2D) coplanar aerostatic system. Standard optical template targets were acquired using charge-coupled device (CCD) image acquisition; after which, positioning errors were measured and compensated for. A 2D Lagrange equation was utilized to compensate for the precision of the precision aerostatic system. Experimental results showed that X- and Y-axis positioning accuracy improved from 5.06 to 1.53 μm and from 3.99 to 1.06 μm, respectively, signifying improvements of over 70%.

UR - http://www.scopus.com/inward/record.url?scp=85068739825&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85068739825&partnerID=8YFLogxK

U2 - 10.1007/s00170-019-04077-3

DO - 10.1007/s00170-019-04077-3

M3 - Article

JO - International Journal of Advanced Manufacturing Technology

JF - International Journal of Advanced Manufacturing Technology

SN - 0268-3768

ER -