In this study, positioning error measurements and compensation techniques were developed for a two-dimensional (2D) coplanar aerostatic system. Standard optical template targets were acquired using charge-coupled device (CCD) image acquisition; after which, positioning errors were measured and compensated for. A 2D Lagrange equation was utilized to compensate for the precision of the precision aerostatic system. Experimental results showed that X- and Y-axis positioning accuracy improved from 5.06 to 1.53 μm and from 3.99 to 1.06 μm, respectively, signifying improvements of over 70%.
|Journal||International Journal of Advanced Manufacturing Technology|
|Publication status||Published - 2019 Jan 1|
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Mechanical Engineering
- Computer Science Applications
- Industrial and Manufacturing Engineering