Aerostatic moving stage positioning compensation using a numerical algorithm combined with an image acquisition method

Ming Fei Chen, Pei Hao Wang, Wen Tse Hsiao

Research output: Contribution to journalArticle

Abstract

In this study, positioning error measurements and compensation techniques were developed for a two-dimensional (2D) coplanar aerostatic system. Standard optical template targets were acquired using charge-coupled device (CCD) image acquisition; after which, positioning errors were measured and compensated for. A 2D Lagrange equation was utilized to compensate for the precision of the precision aerostatic system. Experimental results showed that X- and Y-axis positioning accuracy improved from 5.06 to 1.53 μm and from 3.99 to 1.06 μm, respectively, signifying improvements of over 70%.

Original languageEnglish
Pages (from-to)1203-1210
Number of pages8
JournalInternational Journal of Advanced Manufacturing Technology
Volume104
Issue number1-4
DOIs
Publication statusPublished - 2019 Sep 1

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Software
  • Mechanical Engineering
  • Computer Science Applications
  • Industrial and Manufacturing Engineering

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