Active thermoelectric vacuum sensor based on frequency modulation

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@article{6e4699f2a98f489aa6e50262005bbd36,

title = "Active thermoelectric vacuum sensor based on frequency modulation",

author = "S.-J. Chen and Y.-C. Wu",

note = "Cited By :2 Export Date: 8 August 2020",

year = "2020",

doi = "10.3390/mi11010015",

language = "English",

volume = "11",

journal = "Micromachines",

issn = "2072-666X",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "1",

}