A theoretical analysis and experimental verification of a laser drilling process for a ceramic substrate

Ming-Fei Chen; Wen Tse Hsiao; Ming Cheng Wang; Kai Yu Yang; Ying Fang Chen

doi:10.1007/s00170-015-7219-7

A theoretical analysis and experimental verification of a laser drilling process for a ceramic substrate

Ming-Fei Chen, Wen Tse Hsiao, Ming Cheng Wang, Kai Yu Yang, Ying Fang Chen

Department of Mechatronic Engineering

Research output: Contribution to journal › Article

11 Citations (Scopus)

Abstract

This paper reports theoretical and experimental methods for drilling alumina ceramic substrates by using a nanosecond-pulsed ultraviolet laser. A physical model was established using ANSYS parameter design language finite element software. The influence of laser parameters, such as laser fluence, number of pulses and its duration, and frequency, on morphology—depth, diameter, taper, and temperature distribution—was investigated using three-dimensional confocal laser scanning microscopy. Simulation and experimental results reveal that higher laser fluence and number of pulses produces larger drilling depths and diameters. Laser fluence, pulse duration, frequency, and pulse number of 5.10 J/cm², 1000 μs, 20 kHz, and >9, respectively, can successfully drill through the alumina ceramic substrate. Pulse duration between 3 and 8 ms yielded the smallest hole taper.

Original language	English
Pages (from-to)	1723-1732
Number of pages	10
Journal	International Journal of Advanced Manufacturing Technology
Volume	81
Issue number	9-12
DOIs	https://doi.org/10.1007/s00170-015-7219-7
Publication status	Published - 2015 Dec 1

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Software
Mechanical Engineering
Computer Science Applications
Industrial and Manufacturing Engineering

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title = "A theoretical analysis and experimental verification of a laser drilling process for a ceramic substrate",

abstract = "This paper reports theoretical and experimental methods for drilling alumina ceramic substrates by using a nanosecond-pulsed ultraviolet laser. A physical model was established using ANSYS parameter design language finite element software. The influence of laser parameters, such as laser fluence, number of pulses and its duration, and frequency, on morphology—depth, diameter, taper, and temperature distribution—was investigated using three-dimensional confocal laser scanning microscopy. Simulation and experimental results reveal that higher laser fluence and number of pulses produces larger drilling depths and diameters. Laser fluence, pulse duration, frequency, and pulse number of 5.10 J/cm2, 1000 μs, 20 kHz, and >9, respectively, can successfully drill through the alumina ceramic substrate. Pulse duration between 3 and 8 ms yielded the smallest hole taper.",

author = "Ming-Fei Chen and Hsiao, {Wen Tse} and Wang, {Ming Cheng} and Yang, {Kai Yu} and Chen, {Ying Fang}",

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AU - Chen, Ming-Fei

AU - Hsiao, Wen Tse

AU - Wang, Ming Cheng

AU - Yang, Kai Yu

AU - Chen, Ying Fang

PY - 2015/12/1

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