Abstract
This paper reports theoretical and experimental methods for drilling alumina ceramic substrates by using a nanosecond-pulsed ultraviolet laser. A physical model was established using ANSYS parameter design language finite element software. The influence of laser parameters, such as laser fluence, number of pulses and its duration, and frequency, on morphology—depth, diameter, taper, and temperature distribution—was investigated using three-dimensional confocal laser scanning microscopy. Simulation and experimental results reveal that higher laser fluence and number of pulses produces larger drilling depths and diameters. Laser fluence, pulse duration, frequency, and pulse number of 5.10 J/cm2, 1000 μs, 20 kHz, and >9, respectively, can successfully drill through the alumina ceramic substrate. Pulse duration between 3 and 8 ms yielded the smallest hole taper.
| Original language | English |
|---|---|
| Pages (from-to) | 1723-1732 |
| Number of pages | 10 |
| Journal | International Journal of Advanced Manufacturing Technology |
| Volume | 81 |
| Issue number | 9-12 |
| DOIs | |
| Publication status | Published - 2015 Dec 1 |
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All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Software
- Mechanical Engineering
- Computer Science Applications
- Industrial and Manufacturing Engineering
Cite this
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A theoretical analysis and experimental verification of a laser drilling process for a ceramic substrate. / Chen, Ming-Fei; Hsiao, Wen Tse; Wang, Ming Cheng; Yang, Kai Yu; Chen, Ying Fang.
In: International Journal of Advanced Manufacturing Technology, Vol. 81, No. 9-12, 01.12.2015, p. 1723-1732.Research output: Contribution to journal › Article
TY - JOUR
T1 - A theoretical analysis and experimental verification of a laser drilling process for a ceramic substrate
AU - Chen, Ming-Fei
AU - Hsiao, Wen Tse
AU - Wang, Ming Cheng
AU - Yang, Kai Yu
AU - Chen, Ying Fang
PY - 2015/12/1
Y1 - 2015/12/1
N2 - This paper reports theoretical and experimental methods for drilling alumina ceramic substrates by using a nanosecond-pulsed ultraviolet laser. A physical model was established using ANSYS parameter design language finite element software. The influence of laser parameters, such as laser fluence, number of pulses and its duration, and frequency, on morphology—depth, diameter, taper, and temperature distribution—was investigated using three-dimensional confocal laser scanning microscopy. Simulation and experimental results reveal that higher laser fluence and number of pulses produces larger drilling depths and diameters. Laser fluence, pulse duration, frequency, and pulse number of 5.10 J/cm2, 1000 μs, 20 kHz, and >9, respectively, can successfully drill through the alumina ceramic substrate. Pulse duration between 3 and 8 ms yielded the smallest hole taper.
AB - This paper reports theoretical and experimental methods for drilling alumina ceramic substrates by using a nanosecond-pulsed ultraviolet laser. A physical model was established using ANSYS parameter design language finite element software. The influence of laser parameters, such as laser fluence, number of pulses and its duration, and frequency, on morphology—depth, diameter, taper, and temperature distribution—was investigated using three-dimensional confocal laser scanning microscopy. Simulation and experimental results reveal that higher laser fluence and number of pulses produces larger drilling depths and diameters. Laser fluence, pulse duration, frequency, and pulse number of 5.10 J/cm2, 1000 μs, 20 kHz, and >9, respectively, can successfully drill through the alumina ceramic substrate. Pulse duration between 3 and 8 ms yielded the smallest hole taper.
UR - http://www.scopus.com/inward/record.url?scp=84947488741&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84947488741&partnerID=8YFLogxK
U2 - 10.1007/s00170-015-7219-7
DO - 10.1007/s00170-015-7219-7
M3 - Article
AN - SCOPUS:84947488741
VL - 81
SP - 1723
EP - 1732
JO - International Journal of Advanced Manufacturing Technology
JF - International Journal of Advanced Manufacturing Technology
SN - 0268-3768
IS - 9-12
ER -