A theoretical analysis and experimental verification of a laser drilling process for a ceramic substrate

Ming-Fei Chen, Wen Tse Hsiao, Ming Cheng Wang, Kai Yu Yang, Ying Fang Chen

Research output: Contribution to journalArticle

10 Citations (Scopus)


This paper reports theoretical and experimental methods for drilling alumina ceramic substrates by using a nanosecond-pulsed ultraviolet laser. A physical model was established using ANSYS parameter design language finite element software. The influence of laser parameters, such as laser fluence, number of pulses and its duration, and frequency, on morphology—depth, diameter, taper, and temperature distribution—was investigated using three-dimensional confocal laser scanning microscopy. Simulation and experimental results reveal that higher laser fluence and number of pulses produces larger drilling depths and diameters. Laser fluence, pulse duration, frequency, and pulse number of 5.10 J/cm2, 1000 μs, 20 kHz, and >9, respectively, can successfully drill through the alumina ceramic substrate. Pulse duration between 3 and 8 ms yielded the smallest hole taper.

Original languageEnglish
Pages (from-to)1723-1732
Number of pages10
JournalInternational Journal of Advanced Manufacturing Technology
Issue number9-12
Publication statusPublished - 2015 Dec 1


All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Software
  • Mechanical Engineering
  • Computer Science Applications
  • Industrial and Manufacturing Engineering

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