Abstract
In this study, a simple method for measuring the small displacements is presented. When a circularly polarized heterodyne light beam reflected from a mirror is incident into a hemi-spherical prism and is reflected at the base of the prism. Then the reflected light beam passes through an analyzer for interference. With properly chosen azimuth angles of transmission axis of the analyzer, the phase difference between s- andp- polarized light is sensitive to the incident angle near the internal reflection polarization angle. The phase difference can be accurately measured with the heterodyne interferometry. The small displacement of the mirror causes a small variation of incident angle and a phase change. Therefore, substituting the phase difference into special derived equations; the small displacement can be determined. The proposed method has advantages of common-path configuration and heterodyne interferometry.
| Original language | English |
|---|---|
| Title of host publication | Interferometry XIV |
| Subtitle of host publication | Applications |
| DOIs | |
| Publication status | Published - 2008 Oct 1 |
| Event | Interferometry XIV: Applications - San Diego, CA, United States Duration: 2008 Aug 13 → 2008 Aug 14 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 7064 |
| ISSN (Print) | 0277-786X |
Other
| Other | Interferometry XIV: Applications |
|---|---|
| Country | United States |
| City | San Diego, CA |
| Period | 08-08-13 → 08-08-14 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Cite this
}
A simple method for measuring the small displacements. / Chen, Kun Huang; Chen, Jing Heng; Chen, Kun Tsan; Chiueh, Her Lin; Lin, Jiun You; Wu, Nung Yu.
Interferometry XIV: Applications. 2008. 70640V (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7064).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - A simple method for measuring the small displacements
AU - Chen, Kun Huang
AU - Chen, Jing Heng
AU - Chen, Kun Tsan
AU - Chiueh, Her Lin
AU - Lin, Jiun You
AU - Wu, Nung Yu
PY - 2008/10/1
Y1 - 2008/10/1
N2 - In this study, a simple method for measuring the small displacements is presented. When a circularly polarized heterodyne light beam reflected from a mirror is incident into a hemi-spherical prism and is reflected at the base of the prism. Then the reflected light beam passes through an analyzer for interference. With properly chosen azimuth angles of transmission axis of the analyzer, the phase difference between s- andp- polarized light is sensitive to the incident angle near the internal reflection polarization angle. The phase difference can be accurately measured with the heterodyne interferometry. The small displacement of the mirror causes a small variation of incident angle and a phase change. Therefore, substituting the phase difference into special derived equations; the small displacement can be determined. The proposed method has advantages of common-path configuration and heterodyne interferometry.
AB - In this study, a simple method for measuring the small displacements is presented. When a circularly polarized heterodyne light beam reflected from a mirror is incident into a hemi-spherical prism and is reflected at the base of the prism. Then the reflected light beam passes through an analyzer for interference. With properly chosen azimuth angles of transmission axis of the analyzer, the phase difference between s- andp- polarized light is sensitive to the incident angle near the internal reflection polarization angle. The phase difference can be accurately measured with the heterodyne interferometry. The small displacement of the mirror causes a small variation of incident angle and a phase change. Therefore, substituting the phase difference into special derived equations; the small displacement can be determined. The proposed method has advantages of common-path configuration and heterodyne interferometry.
UR - http://www.scopus.com/inward/record.url?scp=52649105894&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=52649105894&partnerID=8YFLogxK
U2 - 10.1117/12.798201
DO - 10.1117/12.798201
M3 - Conference contribution
AN - SCOPUS:52649105894
SN - 9780819472847
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Interferometry XIV
ER -