A simple method for measuring the small displacements

Kun Huang Chen; Jing Heng Chen; Kun Tsan Chen; Her Lin Chiueh; Jiun You Lin; Nung Yu Wu

doi:10.1117/12.798201

A simple method for measuring the small displacements

Kun Huang Chen, Jing Heng Chen, Kun Tsan Chen, Her Lin Chiueh, Jiun You Lin, Nung Yu Wu

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

In this study, a simple method for measuring the small displacements is presented. When a circularly polarized heterodyne light beam reflected from a mirror is incident into a hemi-spherical prism and is reflected at the base of the prism. Then the reflected light beam passes through an analyzer for interference. With properly chosen azimuth angles of transmission axis of the analyzer, the phase difference between s- andp- polarized light is sensitive to the incident angle near the internal reflection polarization angle. The phase difference can be accurately measured with the heterodyne interferometry. The small displacement of the mirror causes a small variation of incident angle and a phase change. Therefore, substituting the phase difference into special derived equations; the small displacement can be determined. The proposed method has advantages of common-path configuration and heterodyne interferometry.

Original language	English
Title of host publication	Interferometry XIV
Subtitle of host publication	Applications
DOIs	https://doi.org/10.1117/12.798201
Publication status	Published - 2008 Oct 1
Event	Interferometry XIV: Applications - San Diego, CA, United States Duration: 2008 Aug 13 → 2008 Aug 14

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7064
ISSN (Print)	0277-786X

Other

Other	Interferometry XIV: Applications
Country	United States
City	San Diego, CA
Period	08-08-13 → 08-08-14

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.798201

Fingerprint Dive into the research topics of 'A simple method for measuring the small displacements'. Together they form a unique fingerprint.

Cite this

@inproceedings{638ab085aa824fcbbb8a37d71d966668,

title = "A simple method for measuring the small displacements",

abstract = "In this study, a simple method for measuring the small displacements is presented. When a circularly polarized heterodyne light beam reflected from a mirror is incident into a hemi-spherical prism and is reflected at the base of the prism. Then the reflected light beam passes through an analyzer for interference. With properly chosen azimuth angles of transmission axis of the analyzer, the phase difference between s- andp- polarized light is sensitive to the incident angle near the internal reflection polarization angle. The phase difference can be accurately measured with the heterodyne interferometry. The small displacement of the mirror causes a small variation of incident angle and a phase change. Therefore, substituting the phase difference into special derived equations; the small displacement can be determined. The proposed method has advantages of common-path configuration and heterodyne interferometry.",

author = "Chen, {Kun Huang} and Chen, {Jing Heng} and Chen, {Kun Tsan} and Chiueh, {Her Lin} and Lin, {Jiun You} and Wu, {Nung Yu}",

year = "2008",

month = oct,

day = "1",

doi = "10.1117/12.798201",

language = "English",

isbn = "9780819472847",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Interferometry XIV",

note = "Interferometry XIV: Applications ; Conference date: 13-08-2008 Through 14-08-2008",

}

A simple method for measuring the small displacements. / Chen, Kun Huang; Chen, Jing Heng; Chen, Kun Tsan; Chiueh, Her Lin; Lin, Jiun You; Wu, Nung Yu.

Interferometry XIV: Applications. 2008. 70640V (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7064).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - A simple method for measuring the small displacements

AU - Chen, Kun Huang

AU - Chen, Jing Heng

AU - Chen, Kun Tsan

AU - Chiueh, Her Lin

AU - Lin, Jiun You

AU - Wu, Nung Yu

PY - 2008/10/1

Y1 - 2008/10/1

N2 - In this study, a simple method for measuring the small displacements is presented. When a circularly polarized heterodyne light beam reflected from a mirror is incident into a hemi-spherical prism and is reflected at the base of the prism. Then the reflected light beam passes through an analyzer for interference. With properly chosen azimuth angles of transmission axis of the analyzer, the phase difference between s- andp- polarized light is sensitive to the incident angle near the internal reflection polarization angle. The phase difference can be accurately measured with the heterodyne interferometry. The small displacement of the mirror causes a small variation of incident angle and a phase change. Therefore, substituting the phase difference into special derived equations; the small displacement can be determined. The proposed method has advantages of common-path configuration and heterodyne interferometry.

AB - In this study, a simple method for measuring the small displacements is presented. When a circularly polarized heterodyne light beam reflected from a mirror is incident into a hemi-spherical prism and is reflected at the base of the prism. Then the reflected light beam passes through an analyzer for interference. With properly chosen azimuth angles of transmission axis of the analyzer, the phase difference between s- andp- polarized light is sensitive to the incident angle near the internal reflection polarization angle. The phase difference can be accurately measured with the heterodyne interferometry. The small displacement of the mirror causes a small variation of incident angle and a phase change. Therefore, substituting the phase difference into special derived equations; the small displacement can be determined. The proposed method has advantages of common-path configuration and heterodyne interferometry.

UR - http://www.scopus.com/inward/record.url?scp=52649105894&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=52649105894&partnerID=8YFLogxK

U2 - 10.1117/12.798201

DO - 10.1117/12.798201

M3 - Conference contribution

AN - SCOPUS:52649105894

SN - 9780819472847

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Interferometry XIV

T2 - Interferometry XIV: Applications

Y2 - 13 August 2008 through 14 August 2008

ER -