A simple method for measuring the small displacements

Kun Huang Chen, Jing Heng Chen, Kun Tsan Chen, Her Lin Chiueh, Jiun You Lin, Nung Yu Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, a simple method for measuring the small displacements is presented. When a circularly polarized heterodyne light beam reflected from a mirror is incident into a hemi-spherical prism and is reflected at the base of the prism. Then the reflected light beam passes through an analyzer for interference. With properly chosen azimuth angles of transmission axis of the analyzer, the phase difference between s- andp- polarized light is sensitive to the incident angle near the internal reflection polarization angle. The phase difference can be accurately measured with the heterodyne interferometry. The small displacement of the mirror causes a small variation of incident angle and a phase change. Therefore, substituting the phase difference into special derived equations; the small displacement can be determined. The proposed method has advantages of common-path configuration and heterodyne interferometry.

Original languageEnglish
Title of host publicationInterferometry XIV
Subtitle of host publicationApplications
DOIs
Publication statusPublished - 2008 Oct 1
EventInterferometry XIV: Applications - San Diego, CA, United States
Duration: 2008 Aug 132008 Aug 14

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7064
ISSN (Print)0277-786X

Other

OtherInterferometry XIV: Applications
CountryUnited States
CitySan Diego, CA
Period08-08-1308-08-14

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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