A novel micromechanical resonator using two-dimensional phononic crystal slab

Nan Wang, Fu-Li Hsiao, Moorthi Palaniapan, J. M. Tsai, B. W. Soon, Dim Lee Kwong, Chengkuo Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Two-dimensional (2-D) Silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10μm thick free-standing silicon plate with line defects is characterized as a cavity-mode PnC resonator. Piezoelectric aluminum nitride (AlN) film is deployed as the interdigital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite element method (FEM). The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1,000 at its resonant frequency of 152.46MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for RF communications and sensing applications.

Original languageEnglish
Title of host publicationNEMS/MEMS Technology and Devices
Pages195-198
Number of pages4
DOIs
Publication statusPublished - 2011 Jul 12
EventInternational Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS - Suntec, Singapore
Duration: 2011 Jun 262011 Jul 1

Publication series

NameAdvanced Materials Research
Volume254
ISSN (Print)1022-6680

Other

OtherInternational Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS
CountrySingapore
CitySuntec
Period11-06-2611-07-01

Fingerprint

Micromechanical resonators
Crystal resonators
Crystals
Silicon
Aluminum nitride
Microfabrication
Band structure
Transducers
Natural frequencies
Acoustics
Acoustic waves
Finite element method
Defects
Communication
Air

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Wang, N., Hsiao, F-L., Palaniapan, M., Tsai, J. M., Soon, B. W., Kwong, D. L., & Lee, C. (2011). A novel micromechanical resonator using two-dimensional phononic crystal slab. In NEMS/MEMS Technology and Devices (pp. 195-198). (Advanced Materials Research; Vol. 254). https://doi.org/10.4028/www.scientific.net/AMR.254.195
Wang, Nan ; Hsiao, Fu-Li ; Palaniapan, Moorthi ; Tsai, J. M. ; Soon, B. W. ; Kwong, Dim Lee ; Lee, Chengkuo. / A novel micromechanical resonator using two-dimensional phononic crystal slab. NEMS/MEMS Technology and Devices. 2011. pp. 195-198 (Advanced Materials Research).
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abstract = "Two-dimensional (2-D) Silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10μm thick free-standing silicon plate with line defects is characterized as a cavity-mode PnC resonator. Piezoelectric aluminum nitride (AlN) film is deployed as the interdigital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite element method (FEM). The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1,000 at its resonant frequency of 152.46MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for RF communications and sensing applications.",
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Wang, N, Hsiao, F-L, Palaniapan, M, Tsai, JM, Soon, BW, Kwong, DL & Lee, C 2011, A novel micromechanical resonator using two-dimensional phononic crystal slab. in NEMS/MEMS Technology and Devices. Advanced Materials Research, vol. 254, pp. 195-198, International Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS, Suntec, Singapore, 11-06-26. https://doi.org/10.4028/www.scientific.net/AMR.254.195

A novel micromechanical resonator using two-dimensional phononic crystal slab. / Wang, Nan; Hsiao, Fu-Li; Palaniapan, Moorthi; Tsai, J. M.; Soon, B. W.; Kwong, Dim Lee; Lee, Chengkuo.

NEMS/MEMS Technology and Devices. 2011. p. 195-198 (Advanced Materials Research; Vol. 254).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Wang N, Hsiao F-L, Palaniapan M, Tsai JM, Soon BW, Kwong DL et al. A novel micromechanical resonator using two-dimensional phononic crystal slab. In NEMS/MEMS Technology and Devices. 2011. p. 195-198. (Advanced Materials Research). https://doi.org/10.4028/www.scientific.net/AMR.254.195