A novel micromechanical resonator using two-dimensional phononic crystal slab

Nan Wang; Fu Li Hsiao; Moorthi Palaniapan; J. M. Tsai; B. W. Soon; Dim Lee Kwong; Chengkuo Lee

doi:10.4028/www.scientific.net/AMR.254.195

A novel micromechanical resonator using two-dimensional phononic crystal slab

Nan Wang, Fu Li Hsiao, Moorthi Palaniapan, J. M. Tsai, B. W. Soon, Dim Lee Kwong, Chengkuo Lee

Graduate Institute of Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Two-dimensional (2-D) Silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10μm thick free-standing silicon plate with line defects is characterized as a cavity-mode PnC resonator. Piezoelectric aluminum nitride (AlN) film is deployed as the interdigital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite element method (FEM). The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1,000 at its resonant frequency of 152.46MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for RF communications and sensing applications.

Original language	English
Title of host publication	NEMS/MEMS Technology and Devices
Pages	195-198
Number of pages	4
DOIs	https://doi.org/10.4028/www.scientific.net/AMR.254.195
Publication status	Published - 2011
Event	International Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS - Suntec, Singapore Duration: 2011 Jun 26 → 2011 Jul 1

Publication series

Name	Advanced Materials Research
Volume	254
ISSN (Print)	1022-6680

Other

Other	International Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS
Country	Singapore
City	Suntec
Period	11-06-26 → 11-07-01

All Science Journal Classification (ASJC) codes

Engineering(all)

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Cite this

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title = "A novel micromechanical resonator using two-dimensional phononic crystal slab",

abstract = "Two-dimensional (2-D) Silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10μm thick free-standing silicon plate with line defects is characterized as a cavity-mode PnC resonator. Piezoelectric aluminum nitride (AlN) film is deployed as the interdigital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite element method (FEM). The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1,000 at its resonant frequency of 152.46MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for RF communications and sensing applications.",

author = "Nan Wang and Hsiao, {Fu Li} and Moorthi Palaniapan and Tsai, {J. M.} and Soon, {B. W.} and Kwong, {Dim Lee} and Chengkuo Lee",

note = "Copyright: Copyright 2011 Elsevier B.V., All rights reserved.; International Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS ; Conference date: 26-06-2011 Through 01-07-2011",

year = "2011",

doi = "10.4028/www.scientific.net/AMR.254.195",

language = "English",

isbn = "9783037851456",

series = "Advanced Materials Research",

pages = "195--198",

booktitle = "NEMS/MEMS Technology and Devices",

}

Wang, N, Hsiao, FL, Palaniapan, M, Tsai, JM, Soon, BW, Kwong, DL & Lee, C 2011, A novel micromechanical resonator using two-dimensional phononic crystal slab. in NEMS/MEMS Technology and Devices. Advanced Materials Research, vol. 254, pp. 195-198, International Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS, Suntec, Singapore, 11-06-26. https://doi.org/10.4028/www.scientific.net/AMR.254.195

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T1 - A novel micromechanical resonator using two-dimensional phononic crystal slab

AU - Wang, Nan

AU - Hsiao, Fu Li

AU - Palaniapan, Moorthi

AU - Tsai, J. M.

AU - Soon, B. W.

AU - Kwong, Dim Lee

AU - Lee, Chengkuo

PY - 2011

Y1 - 2011

N2 - Two-dimensional (2-D) Silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10μm thick free-standing silicon plate with line defects is characterized as a cavity-mode PnC resonator. Piezoelectric aluminum nitride (AlN) film is deployed as the interdigital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite element method (FEM). The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1,000 at its resonant frequency of 152.46MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for RF communications and sensing applications.

AB - Two-dimensional (2-D) Silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10μm thick free-standing silicon plate with line defects is characterized as a cavity-mode PnC resonator. Piezoelectric aluminum nitride (AlN) film is deployed as the interdigital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite element method (FEM). The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1,000 at its resonant frequency of 152.46MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for RF communications and sensing applications.

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