A novel magnetic-catalytic CMOS MEMS compatible gas sensor with ultra low power consumption

Chih Jen Cheng; Chih Hsiung Shen; Shu Jung Chen

doi:10.1109/ICSENS.2012.6411302

A novel magnetic-catalytic CMOS MEMS compatible gas sensor with ultra low power consumption

Chih Jen Cheng, Chih Hsiung Shen, Shu Jung Chen

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

Beyond the conventional chemical sensors with heating power, we proposed a total new magnetic-catalytic sensing mechanism without heating which includes the original sensing material and also magnetic-catalytic with even higher sensitivity than before. A magnetic material in sol-gel method and a prepared solution of sol-gel SnO₂ is mixed at SnO₂ : Fe ₃O₄ = 3 : 1. The samples with several pH conditions were under test and verified inside a CO gas chamber with solenoidal coils. The sensitivity of proposed monoxide sensor reaches 0.3416%/ppm under 18.2 Gauss without heating which shows applicable for an ultra low power CO sensor with high sensitivity.

Original language	English
Title of host publication	IEEE SENSORS 2012 - Proceedings
DOIs	https://doi.org/10.1109/ICSENS.2012.6411302
Publication status	Published - 2012 Dec 1
Event	11th IEEE SENSORS 2012 Conference - Taipei, Taiwan Duration: 2012 Oct 28 → 2012 Oct 31

Publication series

Name	Proceedings of IEEE Sensors

Other

Other	11th IEEE SENSORS 2012 Conference
Country	Taiwan
City	Taipei
Period	12-10-28 → 12-10-31

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All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Cite this

Cheng, C. J., Shen, C. H., & Chen, S. J. (2012). A novel magnetic-catalytic CMOS MEMS compatible gas sensor with ultra low power consumption. In IEEE SENSORS 2012 - Proceedings [6411302] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2012.6411302

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Access to Document

10.1109/ICSENS.2012.6411302