A novel CMOS compatible gas sensor with stack electrodes

Hsu Pei Chen, Chun Ming Cheng, Chih-Hsiung Shen, Shu Jung Chen

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1 Citation (Scopus)

Abstract

A new proposed gas sensor with stack electrodes was built with small gap of electrodes by using the metal layers in the standard CMOS process. Beyond the conventional finger-type electrodes, the stack electrodes formed from the metal layers of CMOS process provide a lower resistance contact with the sensing material. The proposed gas sensor was built with array of floating membranes and serially connected over an etched cavity. A micro heater of n-type polysilicon with 5.81 kΩ is situated beneath each active area of the membrane to obtain a stable working temperature with several power consumptions conditions. The sensing material SnO 2 for CO detection was deposited onto the stack electrodes after sol-gel formation with deionized water and ammonia (NH 3) to promote the hydrolysis and condensation. After the sensor fabricated, a test wire-bond and TO-5 package was performed and the sample was test and verified inside a CO gas chamber. With careful investigation of measurement results, the sensitivity of proposed monoxide sensor is 0.0625%/ppm without heating and the sensitivity reaches to 0.157%/ppm under 172 μW heating power which is highly beyond the result of previous research work. Nevertheless, a photo enhanced sensitivity of proposed sensor is also investigated which reveals a new approach of highly sensitive gas sensor. The minimum resolution of CO gas concentration detection is below 4.5 ppm which is proved to be adequate for commercial batch production. The experimental measurement shows the research is applicable for a low cost CO sensor with high sensitivity.

Original languageEnglish
Pages (from-to)1125-1130
Number of pages6
JournalSensor Letters
Volume10
Issue number5-6
DOIs
Publication statusPublished - 2012 May 1

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All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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