A new stack electrode type CMOS compatible gas sensor

Hsu Pei Chen, Chun Ming Cheng, Chih-Hsiung Shen, Shu Jung Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new proposed gas sensor with stack electrodes was built to archive an ultra small gap of electrodes by using the metal layers in the standard CMOS process. Beyond the conventional finger-type electrodes, the stack electrodes formed from the inter metal layers of CMOS process provide a lower resistance contact with the sensing material. The proposed gas sensor was built with array of floating membranes and serially connected over an etched cavity. A micro heater of n-type polysilicon with 5.81 kΩ is situated beneath each active area of the membrane to obtain a stable working temperature with several power consumptions conditions. The sensing material SnO 2 for CO detection was deposited onto the stack electrodes after sol-gel formation with deionized water and ammonia (NH3) to promote the hydrolysis and condensation. After the sensor fabricated, a test wire-bond and TO-5 package was performed and the sample was test and verified inside a CO gas chamber. With careful investigation of measurement results, the sensitivity of proposed monoxide sensor is 6.25%/ppm without heating and the sensitivity reaches to 15.7%/ppm under 172 μW heating power which is highly beyond the result of previous research work. The experimental measurement shows the research is applicable for a low cost CO sensor with high sensitivity.

Original languageEnglish
Title of host publicationIEEE Sensors 2011 Conference, SENSORS 2011
Pages1117-1120
Number of pages4
DOIs
Publication statusPublished - 2011 Dec 1
Event10th IEEE SENSORS Conference 2011, SENSORS 2011 - Limerick, Ireland
Duration: 2011 Oct 282011 Oct 31

Publication series

NameProceedings of IEEE Sensors

Other

Other10th IEEE SENSORS Conference 2011, SENSORS 2011
CountryIreland
CityLimerick
Period11-10-2811-10-31

Fingerprint

Chemical sensors
Electrodes
Sensors
Membranes
Heating
Deionized water
Contact resistance
Metals
Polysilicon
Sol-gels
Condensation
Ammonia
Hydrolysis
Electric power utilization
Wire
Gases
Costs
Temperature

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Chen, H. P., Cheng, C. M., Shen, C-H., & Chen, S. J. (2011). A new stack electrode type CMOS compatible gas sensor. In IEEE Sensors 2011 Conference, SENSORS 2011 (pp. 1117-1120). [6127408] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2011.6127408
Chen, Hsu Pei ; Cheng, Chun Ming ; Shen, Chih-Hsiung ; Chen, Shu Jung. / A new stack electrode type CMOS compatible gas sensor. IEEE Sensors 2011 Conference, SENSORS 2011. 2011. pp. 1117-1120 (Proceedings of IEEE Sensors).
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abstract = "A new proposed gas sensor with stack electrodes was built to archive an ultra small gap of electrodes by using the metal layers in the standard CMOS process. Beyond the conventional finger-type electrodes, the stack electrodes formed from the inter metal layers of CMOS process provide a lower resistance contact with the sensing material. The proposed gas sensor was built with array of floating membranes and serially connected over an etched cavity. A micro heater of n-type polysilicon with 5.81 kΩ is situated beneath each active area of the membrane to obtain a stable working temperature with several power consumptions conditions. The sensing material SnO 2 for CO detection was deposited onto the stack electrodes after sol-gel formation with deionized water and ammonia (NH3) to promote the hydrolysis and condensation. After the sensor fabricated, a test wire-bond and TO-5 package was performed and the sample was test and verified inside a CO gas chamber. With careful investigation of measurement results, the sensitivity of proposed monoxide sensor is 6.25{\%}/ppm without heating and the sensitivity reaches to 15.7{\%}/ppm under 172 μW heating power which is highly beyond the result of previous research work. The experimental measurement shows the research is applicable for a low cost CO sensor with high sensitivity.",
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Chen, HP, Cheng, CM, Shen, C-H & Chen, SJ 2011, A new stack electrode type CMOS compatible gas sensor. in IEEE Sensors 2011 Conference, SENSORS 2011., 6127408, Proceedings of IEEE Sensors, pp. 1117-1120, 10th IEEE SENSORS Conference 2011, SENSORS 2011, Limerick, Ireland, 11-10-28. https://doi.org/10.1109/ICSENS.2011.6127408

A new stack electrode type CMOS compatible gas sensor. / Chen, Hsu Pei; Cheng, Chun Ming; Shen, Chih-Hsiung; Chen, Shu Jung.

IEEE Sensors 2011 Conference, SENSORS 2011. 2011. p. 1117-1120 6127408 (Proceedings of IEEE Sensors).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Chen HP, Cheng CM, Shen C-H, Chen SJ. A new stack electrode type CMOS compatible gas sensor. In IEEE Sensors 2011 Conference, SENSORS 2011. 2011. p. 1117-1120. 6127408. (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2011.6127408