A new hybrid method for H2-sensitive devices using WO 3-based film and ACF interconnect

Li Min Kuo, Yu-Tai Shih, Cen-Shawn Wu, Yu Chi Lin, Shuchi Chao

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A new hybrid integration method has been reported for process simplification of conventional metal-oxide sensors with a gold (Au) dopant-like catalyst during hydrogen sulfide (H2S) gas detections at room temperature. Different from conventional fabrications, an anisotropic conduction film (ACF) followed by a sputtered tungsten oxide (WO3) film tapped on Cu electrodes has been utilized in consumer applications. The process steps were reduced without compromising electrical performances. The treated ACF with a thin WO3 film, coated across two closely spaced microelectrodes is employed as the H2S solid-state sensor at room temperature. Apart from exhibiting good interconnects as conductive bumps, Au dopant-like catalyst within ACF will also produce a lower barrier between the bands of electronics, and therefore improve the electrical conductivity significantly. Our integration method offers a number of merits, including high sensitivity to the reference gas, lead-free bonding connection, low-temperature fabrication, high throughput and less fabrication time.

Original languageEnglish
Article number075105
JournalMeasurement Science and Technology
Volume24
Issue number7
DOIs
Publication statusPublished - 2013 Jan 1

Fingerprint

Interconnect
Hybrid Method
Conduction
conduction
Fabrication
fabrication
Catalyst
Doping (additives)
Solid-state sensors
Oxides
catalysts
Catalysts
tungsten oxides
hydrogen sulfide
Microelectrodes
sensors
Hydrogen sulfide
room temperature
simplification
Gases

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Applied Mathematics

Cite this

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abstract = "A new hybrid integration method has been reported for process simplification of conventional metal-oxide sensors with a gold (Au) dopant-like catalyst during hydrogen sulfide (H2S) gas detections at room temperature. Different from conventional fabrications, an anisotropic conduction film (ACF) followed by a sputtered tungsten oxide (WO3) film tapped on Cu electrodes has been utilized in consumer applications. The process steps were reduced without compromising electrical performances. The treated ACF with a thin WO3 film, coated across two closely spaced microelectrodes is employed as the H2S solid-state sensor at room temperature. Apart from exhibiting good interconnects as conductive bumps, Au dopant-like catalyst within ACF will also produce a lower barrier between the bands of electronics, and therefore improve the electrical conductivity significantly. Our integration method offers a number of merits, including high sensitivity to the reference gas, lead-free bonding connection, low-temperature fabrication, high throughput and less fabrication time.",
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A new hybrid method for H2-sensitive devices using WO 3-based film and ACF interconnect. / Kuo, Li Min; Shih, Yu-Tai; Wu, Cen-Shawn; Lin, Yu Chi; Chao, Shuchi.

In: Measurement Science and Technology, Vol. 24, No. 7, 075105, 01.01.2013.

Research output: Contribution to journalArticle

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