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A new high-filling-factor CMOS-compatible thermopile
Shu Jung Chen
,
Chih Hsiung Shen
Department of Mechatronic Engineering
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peer-review
5
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Physics & Astronomy
thermopiles
CMOS
T shape
etching
membranes
floating
quadrants
infrared radiation
residual stress
deviation
sensors
fabrication
performance
Engineering & Materials Science
Thermopiles
Etching
Membranes
Surface morphology
Anisotropic etching
Residual stresses
Infrared radiation
Fabrication
Sensors