A new approach of thermal type microsensor with photonic crystal

Po Hao Hsu, Meng Hung Tsai, Chih-Hsiung Shen, Shu Jung Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A new idea of improving complementary metal-oxidesemiconductor (CMOS) thermopile performance is introduced to increase the absorption of infrared radiation by leading the photonic crystal (PC) into thermopile in this paper. A highly sensitive infrared detector requires an excellent signal induced by incident IR radiation to maximize the temperature change. A photonic crystal structure offers significantly effect for absorption of infrared radiation. Firstly we develop such a structure of thermopile with high performance by using 0.35μm 2P4M CMOS IC compatible process which can be easily and exactly fabricated. Several designs of infrared microsensors are proposed to study influential parameters from photonic crystal structure. The measurement results show these devices get greatly responses higher than the thermopile without photonic crystal. To that end, an optimal parameter is acquired at the same time. Our design is proved to be adequate for commercial batch production.

Original languageEnglish
Title of host publication2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings
Pages283-286
Number of pages4
DOIs
Publication statusPublished - 2010 Oct 18
Event2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Austin, TX, United States
Duration: 2010 May 32010 May 6

Publication series

Name2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings

Other

Other2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010
CountryUnited States
CityAustin, TX
Period10-05-0310-05-06

All Science Journal Classification (ASJC) codes

  • Instrumentation

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  • Cite this

    Hsu, P. H., Tsai, M. H., Shen, C-H., & Chen, S. J. (2010). A new approach of thermal type microsensor with photonic crystal. In 2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings (pp. 283-286). [5488063] (2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings). https://doi.org/10.1109/IMTC.2010.5488063