Abstract
A new idea of improving complementary metal-oxidesemiconductor (CMOS) thermopile performance is introduced to increase the absorption of infrared radiation by leading the photonic crystal (PC) into thermopile in this paper. A highly sensitive infrared detector requires an excellent signal induced by incident IR radiation to maximize the temperature change. A photonic crystal structure offers significantly effect for absorption of infrared radiation. Firstly we develop such a structure of thermopile with high performance by using 0.35μm 2P4M CMOS IC compatible process which can be easily and exactly fabricated. Several designs of infrared microsensors are proposed to study influential parameters from photonic crystal structure. The measurement results show these devices get greatly responses higher than the thermopile without photonic crystal. To that end, an optimal parameter is acquired at the same time. Our design is proved to be adequate for commercial batch production.
| Original language | English |
|---|---|
| Title of host publication | 2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings |
| Pages | 283-286 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2010 Oct 18 |
| Event | 2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Austin, TX, United States Duration: 2010 May 3 → 2010 May 6 |
Publication series
| Name | 2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings |
|---|
Other
| Other | 2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 |
|---|---|
| Country | United States |
| City | Austin, TX |
| Period | 10-05-03 → 10-05-06 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Instrumentation
Cite this
}
A new approach of thermal type microsensor with photonic crystal. / Hsu, Po Hao; Tsai, Meng Hung; Shen, Chih-Hsiung; Chen, Shu Jung.
2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings. 2010. p. 283-286 5488063 (2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - A new approach of thermal type microsensor with photonic crystal
AU - Hsu, Po Hao
AU - Tsai, Meng Hung
AU - Shen, Chih-Hsiung
AU - Chen, Shu Jung
PY - 2010/10/18
Y1 - 2010/10/18
N2 - A new idea of improving complementary metal-oxidesemiconductor (CMOS) thermopile performance is introduced to increase the absorption of infrared radiation by leading the photonic crystal (PC) into thermopile in this paper. A highly sensitive infrared detector requires an excellent signal induced by incident IR radiation to maximize the temperature change. A photonic crystal structure offers significantly effect for absorption of infrared radiation. Firstly we develop such a structure of thermopile with high performance by using 0.35μm 2P4M CMOS IC compatible process which can be easily and exactly fabricated. Several designs of infrared microsensors are proposed to study influential parameters from photonic crystal structure. The measurement results show these devices get greatly responses higher than the thermopile without photonic crystal. To that end, an optimal parameter is acquired at the same time. Our design is proved to be adequate for commercial batch production.
AB - A new idea of improving complementary metal-oxidesemiconductor (CMOS) thermopile performance is introduced to increase the absorption of infrared radiation by leading the photonic crystal (PC) into thermopile in this paper. A highly sensitive infrared detector requires an excellent signal induced by incident IR radiation to maximize the temperature change. A photonic crystal structure offers significantly effect for absorption of infrared radiation. Firstly we develop such a structure of thermopile with high performance by using 0.35μm 2P4M CMOS IC compatible process which can be easily and exactly fabricated. Several designs of infrared microsensors are proposed to study influential parameters from photonic crystal structure. The measurement results show these devices get greatly responses higher than the thermopile without photonic crystal. To that end, an optimal parameter is acquired at the same time. Our design is proved to be adequate for commercial batch production.
UR - http://www.scopus.com/inward/record.url?scp=77957842102&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77957842102&partnerID=8YFLogxK
U2 - 10.1109/IMTC.2010.5488063
DO - 10.1109/IMTC.2010.5488063
M3 - Conference contribution
AN - SCOPUS:77957842102
SN - 9781424428335
T3 - 2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings
SP - 283
EP - 286
BT - 2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings
ER -