A micropump for droplet ejection

C. H. Cheng; S. C. Chen; Y. C. Lin

doi:10.4028/0-87849-990-3.421

A micropump for droplet ejection

C. H. Cheng, S. C. Chen, Y. C. Lin

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

A micropump with the function of ejecting droplet is designed and fabricated. It consists of the three components including the PZT actuator, pump body and nozzle plate. The pump body is made of the silicon while the nozzle plate is formed by nickel electroforming. The nozzle plate with single orifice is assembled to the pump body. The micropump is designed with the rectangular pressure chamber and the diffuser as the dynamic passive valve. It is driven by the PZT actuator which deflects the rectangular diaphragm through a bulge on diaphragm. The design of diaphragm with a bulge makes the assembly of the actuator easier and generates sufficient volume displacement. The volume displacement is not only predicted by ANSYS simulation but also verified by 2-dimensional laser scanning vibrometer. And, the prediction and measurement agree to some extent. The ejected droplets are observed by a visualization setup.

Original language	English
Title of host publication	Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
Publisher	Trans Tech Publications Ltd
Pages	421-426
Number of pages	6
Edition	PART 1
ISBN (Print)	0878499903, 9780878499908
DOIs	https://doi.org/10.4028/0-87849-990-3.421
Publication status	Published - 2006 Jan 1
Event	2005 International Conference on Advanced Manufacture, ICAM2005 - Taipei, R.O.C., Taiwan Duration: 2005 Nov 28 → 2005 Dec 2

Publication series

Name	Materials Science Forum
Number	PART 1
Volume	505-507
ISSN (Print)	0255-5476
ISSN (Electronic)	1662-9752

Other

Other	2005 International Conference on Advanced Manufacture, ICAM2005
Country	Taiwan
City	Taipei, R.O.C.
Period	05-11-28 → 05-12-02

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.4028/0-87849-990-3.421

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Cheng, C. H., Chen, S. C., & Lin, Y. C. (2006). A micropump for droplet ejection. In Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture (PART 1 ed., pp. 421-426). (Materials Science Forum; Vol. 505-507, No. PART 1). Trans Tech Publications Ltd. https://doi.org/10.4028/0-87849-990-3.421

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Cheng, CH, Chen, SC & Lin, YC 2006, A micropump for droplet ejection. in Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1 edn, Materials Science Forum, no. PART 1, vol. 505-507, Trans Tech Publications Ltd, pp. 421-426, 2005 International Conference on Advanced Manufacture, ICAM2005, Taipei, R.O.C., Taiwan, 05-11-28. https://doi.org/10.4028/0-87849-990-3.421

A micropump for droplet ejection. / Cheng, C. H.; Chen, S. C.; Lin, Y. C.

Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1. ed. Trans Tech Publications Ltd, 2006. p. 421-426 (Materials Science Forum; Vol. 505-507, No. PART 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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