Abstract
A micropump with the function of ejecting droplet is designed and fabricated. It consists of the three components including the PZT actuator, pump body and nozzle plate. The pump body is made of the silicon while the nozzle plate is formed by nickel electroforming. The nozzle plate with single orifice is assembled to the pump body. The micropump is designed with the rectangular pressure chamber and the diffuser as the dynamic passive valve. It is driven by the PZT actuator which deflects the rectangular diaphragm through a bulge on diaphragm. The design of diaphragm with a bulge makes the assembly of the actuator easier and generates sufficient volume displacement. The volume displacement is not only predicted by ANSYS simulation but also verified by 2-dimensional laser scanning vibrometer. And, the prediction and measurement agree to some extent. The ejected droplets are observed by a visualization setup.
| Original language | English |
|---|---|
| Title of host publication | Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture |
| Pages | 421-426 |
| Number of pages | 6 |
| Edition | PART 1 |
| Publication status | Published - 2006 Dec 1 |
| Event | 2005 International Conference on Advanced Manufacture, ICAM2005 - Taipei, R.O.C., Taiwan Duration: 2005 Nov 28 → 2005 Dec 2 |
Publication series
| Name | Materials Science Forum |
|---|---|
| Number | PART 1 |
| Volume | 505-507 |
| ISSN (Print) | 0255-5476 |
Other
| Other | 2005 International Conference on Advanced Manufacture, ICAM2005 |
|---|---|
| Country | Taiwan |
| City | Taipei, R.O.C. |
| Period | 05-11-28 → 05-12-02 |
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All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
Cite this
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A micropump for droplet ejection. / Cheng, C. H.; Chen, S. C.; Lin, Y. C.
Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1. ed. 2006. p. 421-426 (Materials Science Forum; Vol. 505-507, No. PART 1).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - A micropump for droplet ejection
AU - Cheng, C. H.
AU - Chen, S. C.
AU - Lin, Y. C.
PY - 2006/12/1
Y1 - 2006/12/1
N2 - A micropump with the function of ejecting droplet is designed and fabricated. It consists of the three components including the PZT actuator, pump body and nozzle plate. The pump body is made of the silicon while the nozzle plate is formed by nickel electroforming. The nozzle plate with single orifice is assembled to the pump body. The micropump is designed with the rectangular pressure chamber and the diffuser as the dynamic passive valve. It is driven by the PZT actuator which deflects the rectangular diaphragm through a bulge on diaphragm. The design of diaphragm with a bulge makes the assembly of the actuator easier and generates sufficient volume displacement. The volume displacement is not only predicted by ANSYS simulation but also verified by 2-dimensional laser scanning vibrometer. And, the prediction and measurement agree to some extent. The ejected droplets are observed by a visualization setup.
AB - A micropump with the function of ejecting droplet is designed and fabricated. It consists of the three components including the PZT actuator, pump body and nozzle plate. The pump body is made of the silicon while the nozzle plate is formed by nickel electroforming. The nozzle plate with single orifice is assembled to the pump body. The micropump is designed with the rectangular pressure chamber and the diffuser as the dynamic passive valve. It is driven by the PZT actuator which deflects the rectangular diaphragm through a bulge on diaphragm. The design of diaphragm with a bulge makes the assembly of the actuator easier and generates sufficient volume displacement. The volume displacement is not only predicted by ANSYS simulation but also verified by 2-dimensional laser scanning vibrometer. And, the prediction and measurement agree to some extent. The ejected droplets are observed by a visualization setup.
UR - http://www.scopus.com/inward/record.url?scp=35348921177&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=35348921177&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:35348921177
SN - 0878499903
SN - 9780878499908
T3 - Materials Science Forum
SP - 421
EP - 426
BT - Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
ER -