A micropump for droplet ejection

C. H. Cheng, S. C. Chen, Y. C. Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


A micropump with the function of ejecting droplet is designed and fabricated. It consists of the three components including the PZT actuator, pump body and nozzle plate. The pump body is made of the silicon while the nozzle plate is formed by nickel electroforming. The nozzle plate with single orifice is assembled to the pump body. The micropump is designed with the rectangular pressure chamber and the diffuser as the dynamic passive valve. It is driven by the PZT actuator which deflects the rectangular diaphragm through a bulge on diaphragm. The design of diaphragm with a bulge makes the assembly of the actuator easier and generates sufficient volume displacement. The volume displacement is not only predicted by ANSYS simulation but also verified by 2-dimensional laser scanning vibrometer. And, the prediction and measurement agree to some extent. The ejected droplets are observed by a visualization setup.

Original languageEnglish
Title of host publicationProgress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
PublisherTrans Tech Publications Ltd
Number of pages6
EditionPART 1
ISBN (Print)0878499903, 9780878499908
Publication statusPublished - 2006 Jan 1
Event2005 International Conference on Advanced Manufacture, ICAM2005 - Taipei, R.O.C., Taiwan
Duration: 2005 Nov 282005 Dec 2

Publication series

NameMaterials Science Forum
NumberPART 1
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752


Other2005 International Conference on Advanced Manufacture, ICAM2005
CityTaipei, R.O.C.

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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