A high performance CMOS compatible thermopile based on noise added mechanism

Recently a novel signal processing theory related with noise has grown and proven. A new high performance thermopile based on noise added scheme has been realized by an embedded heater for CMOS compatible thermoelectric infrared sensor. Certain complex systems can improve performance with added optimal noise that classical theory cannot explain. To that end, we are using noise in remote temperature sensing system to enhance their function without altering the system. The design and fabrication of thermopile sensors are realized by using 1.2μm CMOS IC technology combined with a s ubsequent anisotropic front-side etching. We firstly develop an active thermopile with a heater embedded which is easi ly and naturally driven by a noise generation circuit. The st ochastic resonance theory can be realized as a reduction in threshold of temperature detection. We have greatly impro ved the performance of remote temperature sensing system in the presence of noise. Stochastic resonance can reduce t hreshold detection resolution and greatly improve the temp erature detection limit with a low cost scheme without usin g higher resolution ADC.