A CMOS compatible active thermopile with high frequency measurement

Chih-Hsiung Shen, Wei Fang Chen, Shih Han Yu

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

A considerable number of measurements for microsensors and system characterizations rely on the analysis of its step response. Device parameters of thermal microsensors are essential for evaluating the sensor performances and their simulation modeling. For the thermal microsensors, the thermal parameters are sometimes show important relations to the package, which is not an ideal heat sink. By decoupling the heat equations for the membrane of sensor and package, we first build a multiple-time-constant modeling of thermal microsensors, which describe a more realistic thermal behavior. The behavior on spectrum domain and time domain are predicted and been proved by our experiments. A new investigation of high frequency response for CMOS compatible thermoelectric infrared sensors is proposed and fabricated. The sensors are fabricated by an 1.2 μm industrial CMOS IC technologies combined with a subsequent anisotropic front-side etching stop. To reach a larger response signal, we fabricate a large floating membrane structure with a built-in polysilicon resistor as a signal modulator. It consists of a heating polysilicon resistor and an Al / n-polysilicon thermopile, embedded in an oxide/nitride membrane. High frequency response of test sample shows unexpected large signal, which is quite interesting and never reported before. We have made a thoroughly measurement and analysis, and give some interesting results.

Original languageEnglish
Pages (from-to)457-461
Number of pages5
JournalConference Record - IEEE Instrumentation and Measurement Technology Conference
Volume1
Publication statusPublished - 2004 Oct 8
EventProceedings of the 21st IEEE Instrumentation and Measurement Technology Conference, IMTC/04 - Como, Italy
Duration: 2004 May 182004 May 20

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Thermopiles
Microsensors
Polysilicon
Sensors
Resistors
Frequency response
Membranes
Membrane structures
Step response
Heat sinks
Nitrides
Modulators
Hot Temperature
Etching
Infrared radiation
Heating
Oxides
Computer simulation

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

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abstract = "A considerable number of measurements for microsensors and system characterizations rely on the analysis of its step response. Device parameters of thermal microsensors are essential for evaluating the sensor performances and their simulation modeling. For the thermal microsensors, the thermal parameters are sometimes show important relations to the package, which is not an ideal heat sink. By decoupling the heat equations for the membrane of sensor and package, we first build a multiple-time-constant modeling of thermal microsensors, which describe a more realistic thermal behavior. The behavior on spectrum domain and time domain are predicted and been proved by our experiments. A new investigation of high frequency response for CMOS compatible thermoelectric infrared sensors is proposed and fabricated. The sensors are fabricated by an 1.2 μm industrial CMOS IC technologies combined with a subsequent anisotropic front-side etching stop. To reach a larger response signal, we fabricate a large floating membrane structure with a built-in polysilicon resistor as a signal modulator. It consists of a heating polysilicon resistor and an Al / n-polysilicon thermopile, embedded in an oxide/nitride membrane. High frequency response of test sample shows unexpected large signal, which is quite interesting and never reported before. We have made a thoroughly measurement and analysis, and give some interesting results.",
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A CMOS compatible active thermopile with high frequency measurement. / Shen, Chih-Hsiung; Chen, Wei Fang; Yu, Shih Han.

In: Conference Record - IEEE Instrumentation and Measurement Technology Conference, Vol. 1, 08.10.2004, p. 457-461.

Research output: Contribution to journalConference article

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