A capacitance level sensor design and sensor signal enhancement

Yu Ting Li, Chih Ming Chao, Kerwin Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

This paper introduces a novel fringe field capacitive sensor. To enhance the sensor signal, various sensor electrode design strategies and a surface modification method are introduced, discussed and compared. The sensors are characterized by both simulations and experiments. The experiment results demonstrate the sensor capability of water level measuring. In addition, fringing field sensor of the field strength across the target by the dielectric strength can be used to measure the dielectric constant or component of a solution. The experiment results show that nitrogen plasma surface modification can improve the sensitivity from 69pF/mm to 97pF/mm.

Original languageEnglish
Title of host publicationNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages847-850
Number of pages4
DOIs
Publication statusPublished - 2011 Oct 4
Event6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan
Duration: 2011 Feb 202011 Feb 23

Other

Other6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
CountryTaiwan
CityKaohsiung
Period11-02-2011-02-23

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All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Cite this

Li, Y. T., Chao, C. M., & Wang, K. (2011). A capacitance level sensor design and sensor signal enhancement. In NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 847-850). [6017486] https://doi.org/10.1109/NEMS.2011.6017486