A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators

Kah How Koh, Takeshi Kobayashi, Fu Li Hsiao, Chengkuo Lee

Research output: Contribution to journalConference articlepeer-review

12 Citations (Scopus)


A silicon micromirror driven by a piezoelectric Pb(Zr,Ti)O3 beam actuator has been demonstrated for two-dimensional scanning mirror applications. The mirror is micromachined from the device layer of an SOI wafer, while the piezoelectric beam actuator contains multilayers of Pt/Ti/PZT/Pt/Ti/SiO2/Si which is deposited and released from a SOI wafer. A 1x10 PZT arrayed actuator are separately arranged in parallel on a Si beam. Bending mode is measured at 34Hz as while the torsional mode is measured at 197Hz. We demonstrated 2-D raster scanning patterns by applying AC bias of 34Hz on half of the 10 actuators and 197Hz on the other half actuators.

Original languageEnglish
Pages (from-to)1303-1306
Number of pages4
JournalProcedia Chemistry
Issue number1
Publication statusPublished - 2009 Sep
EventEurosensors 23rd Conference - Lausanne, Switzerland
Duration: 2009 Sep 62009 Sep 9

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Chemical Engineering(all)

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