A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators

Chengkuo Lee, Fu Li Hsiao, Takeshi Kobayashi, Kah How Koh, P. V. Ramana, Wenfeng Xiang, Bin Yang, Chee Wei Tan, D. Pinjala

Research output: Contribution to journalArticle

42 Citations (Scopus)


A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-μm PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.

Original languageEnglish
Article number5233850
Pages (from-to)1529-1536
Number of pages8
JournalIEEE Journal on Selected Topics in Quantum Electronics
Issue number5
Publication statusPublished - 2009 Sep 1


All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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