A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators

Chengkuo Lee; Fu Li Hsiao; Takeshi Kobayashi; Kah How Koh; P. V. Ramana; Wenfeng Xiang; Bin Yang; Chee Wei Tan; D. Pinjala

doi:10.1109/JSTQE.2009.2022959

A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators

Chengkuo Lee, Fu Li Hsiao, Takeshi Kobayashi, Kah How Koh, P. V. Ramana, Wenfeng Xiang, Bin Yang, Chee Wei Tan, D. Pinjala

Graduate Institute of Photonics

Research output: Contribution to journal › Article › peer-review

42 Citations (Scopus)

Abstract

A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-μm PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.

Original language	English
Article number	5233850
Pages (from-to)	1529-1536
Number of pages	8
Journal	IEEE Journal on Selected Topics in Quantum Electronics
Volume	15
Issue number	5
DOIs	https://doi.org/10.1109/JSTQE.2009.2022959
Publication status	Published - 2009 Sep

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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@article{e7b6d35991ee45989ef16ba0ae54e1dc,

title = "A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators",

abstract = "A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-μm PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.",

author = "Chengkuo Lee and Hsiao, {Fu Li} and Takeshi Kobayashi and Koh, {Kah How} and Ramana, {P. V.} and Wenfeng Xiang and Bin Yang and Tan, {Chee Wei} and D. Pinjala",

note = "Funding Information: Manuscript received January 8, 2009; revised March 30, 2009, April 17, 2009, and May 4, 2009. First published September 9, 2009; current version published October 7, 2009. This work was supported by the National University of Singapore, Singapore, under University Research Fund R-263-000-475-112 and Faculty Research Fund R-263-000-358-112/133.",

year = "2009",

month = sep,

doi = "10.1109/JSTQE.2009.2022959",

language = "English",

volume = "15",

pages = "1529--1536",

journal = "IEEE Journal of Selected Topics in Quantum Electronics",

issn = "1077-260X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "5",

}

A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators. / Lee, Chengkuo; Hsiao, Fu Li; Kobayashi, Takeshi; Koh, Kah How; Ramana, P. V.; Xiang, Wenfeng; Yang, Bin; Tan, Chee Wei; Pinjala, D.

In: IEEE Journal on Selected Topics in Quantum Electronics, Vol. 15, No. 5, 5233850, 09.2009, p. 1529-1536.

Research output: Contribution to journal › Article › peer-review

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AU - Lee, Chengkuo

AU - Hsiao, Fu Li

AU - Kobayashi, Takeshi

AU - Koh, Kah How

AU - Ramana, P. V.

AU - Xiang, Wenfeng

AU - Yang, Bin

AU - Tan, Chee Wei

AU - Pinjala, D.

N1 - Funding Information: Manuscript received January 8, 2009; revised March 30, 2009, April 17, 2009, and May 4, 2009. First published September 9, 2009; current version published October 7, 2009. This work was supported by the National University of Singapore, Singapore, under University Research Fund R-263-000-475-112 and Faculty Research Fund R-263-000-358-112/133.

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N2 - A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-μm PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.

AB - A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-μm PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.

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