A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators

Chengkuo Lee; Fu Li Hsiao; Takeshi Kobayashi; Kah How Koh; P. V. Ramana; Wenfeng Xiang; Bin Yang; Chee Wei Tan; D. Pinjala

doi:10.1109/JSTQE.2009.2022959

A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators

Chengkuo Lee, Fu Li Hsiao, Takeshi Kobayashi, Kah How Koh, P. V. Ramana, Wenfeng Xiang, Bin Yang, Chee Wei Tan, D. Pinjala

Graduate Institute of Photonics

Research output: Contribution to journal › Article

42 Citations (Scopus)

Abstract

A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-μm PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.

Original language	English
Article number	5233850
Pages (from-to)	1529-1536
Number of pages	8
Journal	IEEE Journal on Selected Topics in Quantum Electronics
Volume	15
Issue number	5
DOIs	https://doi.org/10.1109/JSTQE.2009.2022959
Publication status	Published - 2009 Sep 1

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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Lee, C., Hsiao, F. L., Kobayashi, T., Koh, K. H., Ramana, P. V., Xiang, W., Yang, B., Tan, C. W., & Pinjala, D. (2009). A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators. IEEE Journal on Selected Topics in Quantum Electronics, 15(5), 1529-1536. [5233850]. https://doi.org/10.1109/JSTQE.2009.2022959

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abstract = "A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-μm PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.",

author = "Chengkuo Lee and Hsiao, {Fu Li} and Takeshi Kobayashi and Koh, {Kah How} and Ramana, {P. V.} and Wenfeng Xiang and Bin Yang and Tan, {Chee Wei} and D. Pinjala",

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A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators. / Lee, Chengkuo; Hsiao, Fu Li; Kobayashi, Takeshi; Koh, Kah How; Ramana, P. V.; Xiang, Wenfeng; Yang, Bin; Tan, Chee Wei; Pinjala, D.

In: IEEE Journal on Selected Topics in Quantum Electronics, Vol. 15, No. 5, 5233850, 01.09.2009, p. 1529-1536.

Research output: Contribution to journal › Article

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AB - A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-μm PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.

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