Abstract
A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-μm PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.
| Original language | English |
|---|---|
| Article number | 5233850 |
| Pages (from-to) | 1529-1536 |
| Number of pages | 8 |
| Journal | IEEE Journal on Selected Topics in Quantum Electronics |
| Volume | 15 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 2009 Sep 1 |
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All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering
Cite this
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A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators. / Lee, Chengkuo; Hsiao, Fu Li; Kobayashi, Takeshi; Koh, Kah How; Ramana, P. V.; Xiang, Wenfeng; Yang, Bin; Tan, Chee Wei; Pinjala, D.
In: IEEE Journal on Selected Topics in Quantum Electronics, Vol. 15, No. 5, 5233850, 01.09.2009, p. 1529-1536.Research output: Contribution to journal › Article
TY - JOUR
T1 - A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators
AU - Lee, Chengkuo
AU - Hsiao, Fu Li
AU - Kobayashi, Takeshi
AU - Koh, Kah How
AU - Ramana, P. V.
AU - Xiang, Wenfeng
AU - Yang, Bin
AU - Tan, Chee Wei
AU - Pinjala, D.
PY - 2009/9/1
Y1 - 2009/9/1
N2 - A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-μm PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.
AB - A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-μm PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.
UR - http://www.scopus.com/inward/record.url?scp=70350210494&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=70350210494&partnerID=8YFLogxK
U2 - 10.1109/JSTQE.2009.2022959
DO - 10.1109/JSTQE.2009.2022959
M3 - Article
AN - SCOPUS:70350210494
VL - 15
SP - 1529
EP - 1536
JO - IEEE Journal of Selected Topics in Quantum Electronics
JF - IEEE Journal of Selected Topics in Quantum Electronics
SN - 1077-260X
IS - 5
M1 - 5233850
ER -