3D finite element analysis and experiment on the piezoelectric ultrasonic transducer motion

Fu Sheng Hsiao; Jen Ai Chao; Yi Cheng Huang

doi:10.1109/ICMA.2009.5246089

3D finite element analysis and experiment on the piezoelectric ultrasonic transducer motion

Fu Sheng Hsiao, Jen Ai Chao, Yi Cheng Huang

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Investigating the displacement motion of the piezoelectric ultrasonic transducers plays an important role for bonding process in package technology. Mechanical vibration and electrical performance analysis of the transducer is a great concern. The commercial 3 D ATILA software is used for simulation first. Best resonance frequency of the transducer is verified and tested via LCR impedance meter and laser Doppler velocity meter experimentally. Both 3D finite element simulation and experimental results reach similar transducer's tip motion behavior for future study.

Original language	English
Title of host publication	2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009
Pages	158-163
Number of pages	6
DOIs	https://doi.org/10.1109/ICMA.2009.5246089
Publication status	Published - 2009 Dec 1
Event	2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009 - Changchun, China Duration: 2009 Aug 9 → 2009 Aug 12

Other

Other	2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009
Country	China
City	Changchun
Period	09-08-09 → 09-08-12

All Science Journal Classification (ASJC) codes

Computer Vision and Pattern Recognition
Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/ICMA.2009.5246089

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Cite this

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title = "3D finite element analysis and experiment on the piezoelectric ultrasonic transducer motion",

abstract = "Investigating the displacement motion of the piezoelectric ultrasonic transducers plays an important role for bonding process in package technology. Mechanical vibration and electrical performance analysis of the transducer is a great concern. The commercial 3 D ATILA software is used for simulation first. Best resonance frequency of the transducer is verified and tested via LCR impedance meter and laser Doppler velocity meter experimentally. Both 3D finite element simulation and experimental results reach similar transducer's tip motion behavior for future study.",

author = "Hsiao, {Fu Sheng} and Chao, {Jen Ai} and Huang, {Yi Cheng}",

year = "2009",

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doi = "10.1109/ICMA.2009.5246089",

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note = "2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009 ; Conference date: 09-08-2009 Through 12-08-2009",

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Hsiao, FS, Chao, JA & Huang, YC 2009, 3D finite element analysis and experiment on the piezoelectric ultrasonic transducer motion. in 2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009., 5246089, pp. 158-163, 2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009, Changchun, China, 09-08-09. https://doi.org/10.1109/ICMA.2009.5246089

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AU - Chao, Jen Ai

AU - Huang, Yi Cheng

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N2 - Investigating the displacement motion of the piezoelectric ultrasonic transducers plays an important role for bonding process in package technology. Mechanical vibration and electrical performance analysis of the transducer is a great concern. The commercial 3 D ATILA software is used for simulation first. Best resonance frequency of the transducer is verified and tested via LCR impedance meter and laser Doppler velocity meter experimentally. Both 3D finite element simulation and experimental results reach similar transducer's tip motion behavior for future study.

AB - Investigating the displacement motion of the piezoelectric ultrasonic transducers plays an important role for bonding process in package technology. Mechanical vibration and electrical performance analysis of the transducer is a great concern. The commercial 3 D ATILA software is used for simulation first. Best resonance frequency of the transducer is verified and tested via LCR impedance meter and laser Doppler velocity meter experimentally. Both 3D finite element simulation and experimental results reach similar transducer's tip motion behavior for future study.

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