TY - GEN
T1 - 12° design rule for single crystal silicon curved beam compliant mechanisms with large deformation
AU - Chen, Tzung Ming
AU - Krausse, Stefan
AU - Korvink, Jan G.
AU - Wallrabe, Ulrike
PY - 2010/6/1
Y1 - 2010/6/1
N2 - We present a new 12° design rule to enhance the reliability of single crystal silicon (SCS) compliant mechanism with large deformation. This rule defines a suitable structure orientation on an SCS wafer and avoids failure of stress induced crystal slip on curved compliant beams. Our rule considers the crystalline directional properties, such as Young's Modulus and fracture strength, of SCS. We fabricated a rotational mirror as demonstrator which was displaced by a piezoelectric actuator. Obeying to the 12° design rule we achieved a 100% larger rotational angle at the mirror section than in case of arbitrary orientation.
AB - We present a new 12° design rule to enhance the reliability of single crystal silicon (SCS) compliant mechanism with large deformation. This rule defines a suitable structure orientation on an SCS wafer and avoids failure of stress induced crystal slip on curved compliant beams. Our rule considers the crystalline directional properties, such as Young's Modulus and fracture strength, of SCS. We fabricated a rotational mirror as demonstrator which was displaced by a piezoelectric actuator. Obeying to the 12° design rule we achieved a 100% larger rotational angle at the mirror section than in case of arbitrary orientation.
UR - http://www.scopus.com/inward/record.url?scp=77952767735&partnerID=8YFLogxK
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U2 - 10.1109/MEMSYS.2010.5442442
DO - 10.1109/MEMSYS.2010.5442442
M3 - Conference contribution
AN - SCOPUS:77952767735
SN - 9781424457649
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 552
EP - 555
BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Y2 - 24 January 2010 through 28 January 2010
ER -