• Taiwan

Research Output 1985 2020

Filter
Conference article
2005

Effects of N2O fluence on the PECVD-grown Si-rich SiO x with buried Si nanocrystals

Lin, C. J., Kuo, H. C., Chen, C. Y., Chueh, Y. L., Chou, L. J., Chang, C-W., Diau, E. W. G. & Lin, G. R., 2005 Dec 1, In : Materials Research Society Symposium Proceedings. 862, p. 319-324 6 p., A19.11.

Research output: Contribution to journalConference article

Silicon oxides
Plasma enhanced chemical vapor deposition
Nanocrystals
nanocrystals
fluence

Improved near-infrared luminescence of Si-rich SiO2 with buried Si nanocrystals grown by PECVD at optimized N2O fluence

Chen, C. Y., Lin, C. J., Kuo, H. C., Lin, G. R., Chueh, Y. L., Chou, L. J., Chang, C-W. & Diau, E. W. G., 2005 Aug 22, In : Proceedings of SPIE - The International Society for Optical Engineering. 5713, p. 592-599 8 p., 86.

Research output: Contribution to journalConference article

Nanocrystals
Nitrous Oxide
Chemical Vapor Deposition
Luminescence
SiO2